Modelling of dcMS and HiPIMS process with hydrocarbon gas admixture

Fekete, Matej (Corresponding author); Kroker, Michael; Souček, Pavel; Klein, Peter; VaÅ¡ina, Petr

Bristol : IOP Publ. (2022)
Journal Article

In: Plasma sources science and technology
Volume: 31
Issue: 6
Page(s)/Article-Nr.: 065008

Institutions

• Division of Materials Science and Engineering [520000]
• Chair of Materials Chemistry [521110]