Deviations between film and target compositions induced by backscattered Ar during sputtering from M2-Al-C (M = Cr, Zr, and Hf) composite targets

Chien, Yu-Ping (Corresponding author); Mráz, Stanislav; Fekete, Matej; Hans, Marcus; Primetzhofer, Daniel; Kolozsvári, Szilárd; Polcik, Peter; Schneider, Jochen M.

Amsterdam [u.a.] : Elsevier Science (2022)
Journal Article

In: Surface and coatings technology
Volume: 446
Page(s)/Article-Nr.: 128764

Institutions

• Division of Materials Science and Engineering [520000]
• Chair of Materials Chemistry [521110]