Large-area deposition of protective (Ti,Al)N coatings onto polycarbonate

Patterer, Lena (Corresponding author); Kollmann, Sabrina (Corresponding author); de los Arcos, Teresa; Jende, Leonie; Karimi Aghda, Soheil; Holzapfel, Damian Mauritius; Salman, Sameer A.; Mráz, Stanislav; Grundmeier, Guido; Schneider, Jochen M.

New York, NY : American Institute of Physics (2023)
Journal Article

In: Journal of vacuum science & technology : JVST / A
Volume: 41
Issue: 5
Page(s)/Article-Nr.: 053112

Institutions

• Division of Materials Science and Engineering [520000]
• Chair of Materials Chemistry [521110]